Electron-Beam Interactions with Solids

Electron-Beam Interactions with Solids

Author: Maurizio Dapor

Publisher: Springer Science & Business Media

ISBN: 9783540006527

Category: Science

Page: 118

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The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.
Electron-Beam Interactions with Solids
Language: en
Pages: 118
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2003-04-23 - Publisher: Springer Science & Business Media

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book
Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography
Language: en
Pages: 392
Authors: David F. Kyser
Categories: Science
Type: BOOK - Published: 1984 - Publisher: Scanning Microscopy International

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Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid isothermal annealing; adiabatic annealing with laser and electron
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Language: en
Pages: 842
Authors: Materials Research Society. Fall Meeting, Materials Research Society. Meeting
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Introduction to Focused Ion Beams
Language: en
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Authors: Lucille A. Giannuzzi, North Carolina State University
Categories: Science
Type: BOOK - Published: 2006-05-18 - Publisher: Springer Science & Business Media

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