Electron-Beam Interactions with Solids

Electron-Beam Interactions with Solids

Author: Maurizio Dapor

Publisher: Springer Science & Business Media

ISBN: 9783540006527

Category: Science

Page: 103

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The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.
Electron-Beam Interactions with Solids
Language: en
Pages: 103
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2003-04-23 - Publisher: Springer Science & Business Media

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book
Electron-Beam Interactions with Solids
Language: en
Pages: 124
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2014-01-15 - Publisher:

Books about Electron-Beam Interactions with Solids
Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography
Language: en
Pages: 372
Authors: David F. Kyser, Daniel Halibey
Categories: Science
Type: BOOK - Published: 1984 - Publisher: Scanning Microscopy International

Books about Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography
Electron-Beam Interactions with Solids
Language: en
Pages: 110
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2003-04-23 - Publisher: Springer

The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of
PFEFFERKORN CONFERENCE on ELECTRON BEAM INTERACTIONS with SOLIDS for MICROSCOPY, MICROANALYSIS, AND MICROLITHOGRAPHY(1982)
Language: en
Pages:
Authors: Maurizio Dapor
Categories: Backscattering
Type: BOOK - Published: 1984 - Publisher:

Books about PFEFFERKORN CONFERENCE on ELECTRON BEAM INTERACTIONS with SOLIDS for MICROSCOPY, MICROANALYSIS, AND MICROLITHOGRAPHY(1982)