Electron-Beam Interactions with Solids

Electron-Beam Interactions with Solids

Author: Maurizio Dapor

Publisher: Springer

ISBN: 9783540365075

Category: Science

Page: 110

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The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical problems. This method is very useful for the study of electron penetration in matter. The probabilistic laws of the interaction of an individual electron with the atoms constituting the target are well known. Consequently, it is possible to compute the macroscopic characteristics of interaction processes by simulating a large number of real trajectories, and then averaging them. The aim of this book is to study the probabilistic laws of the interaction of individual electrons with atoms (elastic and inelastic cross-sections); to - vestigate selected aspects of electron interaction with matter (backscattering coe?cients for bulk targets, absorption, backscattering and transmission for both supported and unsupported thin ?lms, implantation pro?les, seconda- electron emission, and so on); and to introduce the Monte Carlo method and its applications to compute the macroscopic characteristics of the inter- tion processes mentioned above. The book compares theory, computational simulations and experimental data in order to o?er a more global vision.
Electron-Beam Interactions with Solids
Language: en
Pages: 110
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2003-07-03 - Publisher: Springer

The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of
Electron-Beam Interactions with Solids
Language: en
Pages: 110
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2003-04-23 - Publisher: Springer

The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of
Electron-Beam Interactions with Solids
Language: en
Pages: 124
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: 2014-01-15 - Publisher:

Books about Electron-Beam Interactions with Solids
Electron-Beam Interactions with Solids
Language: en
Pages:
Authors: Maurizio Dapor
Categories: Science
Type: BOOK - Published: - Publisher: Springer Science & Business Media

Books about Electron-Beam Interactions with Solids
Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography
Language: en
Pages: 372
Authors: David F. Kyser, Daniel Halibey
Categories: Science
Type: BOOK - Published: 1984 - Publisher: Scanning Microscopy International

Books about Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography