Language: en
Pages: 118
Pages: 118
The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book
Language: en
Pages: 392
Pages: 392
Books about Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography
Language: en
Pages: 370
Pages: 370
Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid isothermal annealing; adiabatic annealing with laser and electron
Language: en
Pages: 842
Pages: 842
Books about Laser and Electron-beam Interactions with Solids
Language: en
Pages: 357
Pages: 357
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.